This standard specifies the technical requirements, test methods, inspection rules, and packaging, labeling, transportation, storage, and safety requirements for ammonia products.
This standard is applicable to the semiconductor industry for chemical vapor deposition of silicon nitride and gallium nitride, and can also be used for nitridation of silicon or silicon oxide.
Haohan Chromatography (Shandong) Application Technology Development Co., Ltd. has developed and produced the "3A packed chromatography column application on Agilent 7890", which has high column efficiency and good separation. It can be used in high-purity ammonia for nitrogen, carbon monoxide, acetylene, and C1 to C3 hydrocarbons
Installed and used on Agilent, Shimadzu, Thermo Fisher, Varian, Brooke, and PE with good results.
Name: 3A molecular sieve packed column
Specification: 2m * 3mm, 0.2-0.25mm
Maximum operating temperature: 320 ° C
Application: GB/T 14601-1993 Electronic industry gases - High purity ammonia nitrogen, carbon monoxide, acetylene, hydrocarbons C1 to C3
本标准规定了氨的技术要求,试验方法,检验规则及产品的包装、标志、运输、贮存及安全要求。
本标准适用于半导体工业,氮化硅、氮化镓的化学气相淀积,也可用于硅或氧化硅的氮化。
浩瀚色谱（山东）应用技术开发有限公司,研制生产的《3A填充色谱柱应用在安捷伦7890上》，柱效高，分离好，，在高纯氨中氮，一氧化碳，乙炔C1-C3烃中
在安捷伦，岛津，赛默飞，瓦里安，布鲁克，PE上安装使用，效果良好。
名称：3A分子筛填充柱
规格：2m*3mm,0.2-0.25mm
zui高使用温度：320°C
应用：GB/T 14601-1993 电子工业用气体 高纯氨 氮，一氧化碳，乙炔，烃C1-C3
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